The fully automated wafer processing bench offers greater control over chemical formulations, a smaller margin for error and efficiency with walk-away operation.
Acid Fume Scrubber uses media made of plastic or ceramic, designed with a large surface area to give the fumes maximum opportunity to dissolve in solution.
Downward spraying petcock nozzles above each sink deliver liquid solvents for rinsing and nitrogen/air for drying. The nozzles extend outward for extra clearance and point down to facilitate cleaning procedures.
Gauges and knobs on the rear allow pressure control of air and solvent lines. Quick-connect fittings on the other side feed each line. Additional service lines can be installed. Plumbing is also available in other materials, including Teflon and polypropylene.