5 chamber clear acrylic wafer box | 9130-21B displayed

Wafer Storage Desiccators,Wafer Storage Desiccators

Desiccator; Wafer Box, for 200 mm Wafers, Clear Acrylic, 5 Chambers, 27.375" W x 24.625" D x 60.625" H

Available ISO Ratings: ISO 8

• Material: Clear Acrylic

• Wafer Size: 200 mm

• Number of Chambers: 5

• Chamber Dimensions: 25.25" W x 22.5" D x 11.75" H

• Opening Dimensions: 25.625" W x 10.875" H

• Unit of Measure: EA

Terra Part #: 9130-21B

Manufactured By: Terra Universal

Warranty: 1 year parts, 90 days labor

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Summary

Available ISO Ratings: ISO 8

Chambers Per Tier: 1

Wafer Size: 200mm

Capacity: 20 (based on box size of 10.75" x 10.94" x 9.88" (273 x 278 x 249 mm) with 4 boxes per chamber)

Chamber size designed to accommodate wafers with optimum air flow and humidity

Chrome-plated LiftLatches™ included; Locking Liftlatches also available - specify Locking Liftlatch for each chamber when the cabinet is ordered

Upgrade to all-stainless steel LiftLatches™ to minimize scratching, corrosion and contamination resulting over time with chrome-plated latches; specify when ordering

Powder-coated Steel Stand can be ordered separately

CAUTION: Acrylic is damaged by alcohol and many other cleaning agents. Use only water and mild detergent

Specifications

• Material: Clear Acrylic

• Wafer Size: 200 mm

• Number of Chambers: 5

• Chamber Dimensions: 25.25" W x 22.5" D x 11.75" H

• Opening Dimensions: 25.625" W x 10.875" H

• Unit of Measure: EA

• Marks & Listings: CE, UL, ULC

• Weight, Product: 100 lb

• Dimensions, Product: 27.375" W x 24.625" D x 60.625" H

• Weight, Shipping: 224 lb

• Dimensions, Shipping: 66" W x 30" D x 28" H

• Package Type: Crate

Wafer Storage Desiccators

Features and Benefits

Acrylic Wafer Box Desiccator Cabinet

Wafer Desiccators are designed specifically for standard lot boxes used for 200 mm and 300 mm wafers. Advanced construction features include plenum chamber, 304 stainless steel door frames, LiftLatches™, and one-piece front sealing panel

Optimal Space Efficiency

Wafer Desiccator Cabinets are designed specifically for standard 200 mm and 300 mm wafer lot boxes used in semiconductor operations; select dissipative PVC for static safety.

Automatic Relief/Bleed Valve

Terra's Automatic Relief/Bleed (RB) Valve opens up at 0.01 PSI, relieving overpressure that could damage desiccators; also works as a check valve to prevent influx of room air.

High Caliber Hardware

Seemingly small details like latches, ports, glides and hinges are often overlooked or ignored by other manufacturers, and later become the point of costly recurring maintenance or equipment failure. Terra’s products are made of long lasting, cleanroom compatible, top tier hardware. Individual components are carefully designed and rigorously tested to guarantee the highest quality, durability, and craftsmanship.

Reinforced Doors with Non-adhesive Gaskets

Stainless steel door frames extend desiccator life; one-piece fused gaskets are non-outgassing, will not creep or sag

Built-in Plenum Distributes Dry Gas to Each Chamber

Manual flowmeter or automated system controls nitrogen flow rates to maintain RH across entire cabinet. Built-in plenum distributes dry gas to each chamber.

Durable Embedded Static-Dissipative Layers

Terra's SDPVC features bonded dissipative layers that resist abrasion. SDPVC desiccators retain their surface resistivity of 106 - 108 ohms/square indefinitely (unlike spray-on coatings that can wear off after a few years), protecting your materials against ESD damage. Further, the control of static charges eliminates particle attractions, helping maintain clean surfaces.

Doors - The First Failure Point of a Desiccator Cabinet

Terra’s stainless steel door frames eliminate the need for internal reinforcements, which create particle surfaces and compromise cleaning. Unlike other doors with glue-on anti-bow pieces, Terra’s doors use no adhesives. This eliminates particle traps, sources of outgassing—and extends the strength and service life of the desiccator.

Desiccator Plenum Chamber For Uniform Gas Distribution

Multi-chamber desiccator cabinets include a perforated plenum to minimize back fill, ensure uniform gas distribution to all chambers and increase cabinet strength

Highest Standards For Desiccators and Electronic Components

Terra’s desiccator cabinets and RH control systems are designed and built to the highest standards required by defense and semiconductor industries for long-term reliability and protection against damage, injuries, and electrical hazards.

Continuous Product Improvement

At Terra, we strive to develop and produce the highest quality products for our customers to improve health, safety, performance, and yields. Our product quality is enabled by high-grade manufacturing equipment and processes, 45 years of engineering and application expertise, and our commitment to continuously improve.

Long-Term Customers

Terra is committed to building long-term relationships with satisfied clients; 94% of orders each year come from repeat customers

Comprehensive Product Portfolio

Terra’s comprehensive product portfolio includes solutions for every application and budget. Our technical sales staff will guide you toward the product most suitable for your requirements.

ISO 7 Smart® Desiccator Cabinet on Automatic Height Adjustable Workstation

Automatic height adjusting workstations allow users to quickly alternate between comfortable sitting and standing positions while performing different tasks with heavy equipment on the workspace, such as this Smart® Desiccator Cabinet connected to a Nitrogen Generator.

Catalog of CE-Marked Products

Terra offers over 1,700 CE-marked products configured for international voltage requirements

Rapid Drying of Hygroscopic Material

Terra's gas-purged desiccators utilize a rapid flow of inert nitrogen to quickly dry hygroscopic samples and components

Popular Accessories

For a full list of accessories, select a product then click Choose Accessories on that product page.

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Universal Base Stands Offer Excellent Versatility

Universal base stands support and stabilize various equipment sizes. Adjustable telescoping members allow for a precise fit. Choose between stainless and powder-coated steel to fit your desired application.
Universal Stand Adjusts to Fit a Wide Range of Equipment

Terra's Universal stands easily adjust to fit a wide range of equipment. Multi-purpose stand frames are suitable for many types of cleanroom equipment, including refrigerators, freezers, incubators, ovens, and vacuum chambers.
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Humidity and Temperature Data Logger

Records storage conditions inside a Desiccator chamber-adjustable logging interval (hours to months), USB port for easy data download in several formats.
3-inch Diameter Caster Set

Casters are easily retrofitted for mobility. Products can be rolled out of the way when cleaning or relocated as workflow changes.
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Laboratory Nitrogen Generator

Terra’s Nitrogen Generators provide a continuous, reliable supply of clean, dry nitrogen up to 99% pure to eliminate dependence on bulky canisters to operate desiccators and glove boxes.
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Universal Adjustable Base Stands for Desiccator Cabinets and Cleanroom Equipment

Stainless steel or powder-coated steel base stands easily adjust to fit cabinets, desiccators and cleanroom equipment of any size or shape. Stands raises equipment to ergonomic height to ease disinfection and sample monitoring. BioSafe design suitable for any cleanroom or lab environment.
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Desiccator Cabinet Ionizing Module

Ionizing modules are available for desiccator cabinets, glove boxes and other enclosures to ensure static-safe storage and processing (shown: ionizing unit on 2-chamber desiccator)
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Dual Purge™ and NitroWatch™ Work Together to Fully Automate RH Control

Terra's Dual Purge™ and NitroWatch™ operate in tandem to precisely and automatically control the flow of nitrogen and maintain a preset humidity level (from ambient to 0% ± 1.5% RH), no matter how operating conditions may change.
Data Logging with 113,000 Readings at User Defined Intervals

Terra's Smart® IsoDry® Nitro-Watch™ logs RH, temp, door open/close, purge on/off, and sensor removal/attachment. The max data file size is roughly 4 MB or 113,000 readings. This is approximately 32 hours of data when logging at 1 second intervals, 2 weeks at 10 second intervals, 6 weeks at 30 second intervals, or 12 weeks at 1 minute intervals. When the system reaches the 4MB limit, data begins to wrap, overwriting oldest data with new.
Plug & Play Data Logging

Plug in a USB flash drive to your Smart® IsoDry® Nitro-Watch™ to transfer data in .CSV format. No software required.